Electron energy-loss spectroscopy of alternative gate dielectric stacks

Susanne Stemmer, D. Klenov, Z. Chen, J. P. Maria, A. I. Kingon, D. Niu, G. N. Parsons

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)66-67
Number of pages2
JournalMicroscopy and Microanalysis
Issue numberSUPPL. 2
StatePublished - 2002

All Science Journal Classification (ASJC) codes

  • Instrumentation

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