Electron energy-loss spectroscopy of alternative gate dielectric stacks

Susanne Stemmer; D. Klenov; Z. Chen; J. P. Maria; A. I. Kingon; D. Niu; G. N. Parsons

doi:10.1017/s1431927602101826

Electron energy-loss spectroscopy of alternative gate dielectric stacks

Susanne Stemmer
, D. Klenov
, Z. Chen
, J. P. Maria
, A. I. Kingon
, D. Niu
, G. N. Parsons

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	66-67
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	8
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/s1431927602101826
State	Published - 2002

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title = "Electron energy-loss spectroscopy of alternative gate dielectric stacks",

author = "Susanne Stemmer and D. Klenov and Z. Chen and Maria, \{J. P.\} and Kingon, \{A. I.\} and D. Niu and Parsons, \{G. N.\}",

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language = "English (US)",

volume = "8",

pages = "66--67",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

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}

TY - JOUR

T1 - Electron energy-loss spectroscopy of alternative gate dielectric stacks

AU - Stemmer, Susanne

AU - Klenov, D.

AU - Chen, Z.

AU - Maria, J. P.

AU - Kingon, A. I.

AU - Niu, D.

AU - Parsons, G. N.

PY - 2002

Y1 - 2002

UR - https://www.scopus.com/pages/publications/0036412047

UR - https://www.scopus.com/pages/publications/0036412047#tab=citedBy

U2 - 10.1017/s1431927602101826

DO - 10.1017/s1431927602101826

M3 - Article

AN - SCOPUS:0036412047

SN - 1431-9276

VL - 8

SP - 66

EP - 67

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -

Electron energy-loss spectroscopy of alternative gate dielectric stacks

All Science Journal Classification (ASJC) codes

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