Electron microscope studies of an alloyed Au/Ni/Au-Ge ohmic contact to GaAs

T. S. Kuan, P. E. Batson, T. N. Jackson, H. Rupprecht, E. L. Wilkie

Research output: Contribution to journalArticlepeer-review

195 Scopus citations


The interface structures resulting from the alloying reactions between a Au/Ni/Au-Ge composite film and a (100) GaAs substrate were studied by transmission electron microscopy and scanning transmission electron microscopy. Electron microscope examinations of the cross-sectional samples prepared in this study offered excellent lateral and depth resolution of local structures which are not available by other analytical techniques used previously in similar studies. The distributions and chemical compositions of various phases formed, and the morphologies of the interfaces between these phases were monitored and compared with the measured contact resistances at three different stages of alloying. A correlation between the interface structure and the contact resistance was found.

Original languageEnglish (US)
Pages (from-to)6952-6957
Number of pages6
JournalJournal of Applied Physics
Issue number12
StatePublished - 1983

All Science Journal Classification (ASJC) codes

  • General Physics and Astronomy


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