Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap

J. F. Conley; P. M. Lenahan; P. Roitman

doi:10.1063/1.106809

Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap

J. F. Conley, P. M. Lenahan, P. Roitman

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Abstract

We present direct evidence for deep electron traps and structural changes in separation by implanted oxygen (SIMOX) buried oxides and evidence that some positively charged E' centers are compensated by negatively charged centers in SIMOX oxides.

Original language	English (US)
Pages (from-to)	2889-2891
Number of pages	3
Journal	Applied Physics Letters
Volume	60
Issue number	23
DOIs	https://doi.org/10.1063/1.106809
State	Published - Dec 1 1992

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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title = "Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap",

abstract = "We present direct evidence for deep electron traps and structural changes in separation by implanted oxygen (SIMOX) buried oxides and evidence that some positively charged E' centers are compensated by negatively charged centers in SIMOX oxides.",

author = "Conley, {J. F.} and Lenahan, {P. M.} and P. Roitman",

year = "1992",

month = dec,

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doi = "10.1063/1.106809",

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journal = "Applied Physics Letters",

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T1 - Electron spin resonance of separation by implanted oxygen oxides

T2 - Evidence for structural change and a deep electron trap

AU - Conley, J. F.

AU - Lenahan, P. M.

AU - Roitman, P.

PY - 1992/12/1

Y1 - 1992/12/1

N2 - We present direct evidence for deep electron traps and structural changes in separation by implanted oxygen (SIMOX) buried oxides and evidence that some positively charged E' centers are compensated by negatively charged centers in SIMOX oxides.

AB - We present direct evidence for deep electron traps and structural changes in separation by implanted oxygen (SIMOX) buried oxides and evidence that some positively charged E' centers are compensated by negatively charged centers in SIMOX oxides.

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DO - 10.1063/1.106809

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

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Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap

Abstract

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