Electron spin resonance studies of interlayer dielectrics

Brad C. Bittel, T. A. Pomorski, P. M. Lenahan, S. W. King

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Advanced Metallization Conference 2011
Pages	60-61
Number of pages	2
State	Published - 2011
Event	Advanced Metallization Conference 2011 - San Diego, CA, United States Duration: Oct 4 2011 → Oct 6 2011

Name	Advanced Metallization Conference (AMC)
ISSN (Print)	1540-1766

Other	Advanced Metallization Conference 2011
Country/Territory	United States
City	San Diego, CA
Period	10/4/11 → 10/6/11

All Science Journal Classification (ASJC) codes

@inproceedings{2295992d9fc74bbb8ab346c9832e4f1b,

title = "Electron spin resonance studies of interlayer dielectrics",

author = "Bittel, {Brad C.} and Pomorski, {T. A.} and Lenahan, {P. M.} and King, {S. W.}",

year = "2011",

language = "English (US)",

isbn = "9781618394262",

series = "Advanced Metallization Conference (AMC)",

pages = "60--61",

booktitle = "Advanced Metallization Conference 2011",

note = "Advanced Metallization Conference 2011 ; Conference date: 04-10-2011 Through 06-10-2011",

}

TY - GEN

T1 - Electron spin resonance studies of interlayer dielectrics

AU - Bittel, Brad C.

AU - Pomorski, T. A.

AU - Lenahan, P. M.

AU - King, S. W.

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?scp=84860199452&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84860199452&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84860199452

SN - 9781618394262

T3 - Advanced Metallization Conference (AMC)

SP - 60

EP - 61

BT - Advanced Metallization Conference 2011

T2 - Advanced Metallization Conference 2011

Y2 - 4 October 2011 through 6 October 2011

ER -