@inproceedings{2295992d9fc74bbb8ab346c9832e4f1b,
title = "Electron spin resonance studies of interlayer dielectrics",
author = "Bittel, {Brad C.} and Pomorski, {T. A.} and Lenahan, {P. M.} and King, {S. W.}",
year = "2011",
month = dec,
day = "1",
language = "English (US)",
isbn = "9781618394262",
series = "Advanced Metallization Conference (AMC)",
pages = "60--61",
booktitle = "Advanced Metallization Conference 2011",
note = "Advanced Metallization Conference 2011 ; Conference date: 04-10-2011 Through 06-10-2011",
}