Electron spin resonance studies of interlayer dielectrics

Brad C. Bittel; T. A. Pomorski; P. M. Lenahan; S. W. King

Electron spin resonance studies of interlayer dielectrics

Brad C. Bittel
, T. A. Pomorski
, P. M. Lenahan
, S. W. King

Engineering Science and Mechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Advanced Metallization Conference 2011
Pages	60-61
Number of pages	2
State	Published - 2011
Event	Advanced Metallization Conference 2011 - San Diego, CA, United States Duration: Oct 4 2011 → Oct 6 2011

Publication series

Name	Advanced Metallization Conference (AMC)
ISSN (Print)	1540-1766

Other

Other	Advanced Metallization Conference 2011
Country/Territory	United States
City	San Diego, CA
Period	10/4/11 → 10/6/11

All Science Journal Classification (ASJC) codes

General Materials Science
Industrial and Manufacturing Engineering

Cite this

@inproceedings{2295992d9fc74bbb8ab346c9832e4f1b,

title = "Electron spin resonance studies of interlayer dielectrics",

author = "Bittel, \{Brad C.\} and Pomorski, \{T. A.\} and Lenahan, \{P. M.\} and King, \{S. W.\}",

year = "2011",

language = "English (US)",

isbn = "9781618394262",

series = "Advanced Metallization Conference (AMC)",

pages = "60--61",

booktitle = "Advanced Metallization Conference 2011",

note = "Advanced Metallization Conference 2011 ; Conference date: 04-10-2011 Through 06-10-2011",

}

TY - GEN

T1 - Electron spin resonance studies of interlayer dielectrics

AU - Bittel, Brad C.

AU - Pomorski, T. A.

AU - Lenahan, P. M.

AU - King, S. W.

PY - 2011

Y1 - 2011

UR - https://www.scopus.com/pages/publications/84860199452

UR - https://www.scopus.com/pages/publications/84860199452#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:84860199452

SN - 9781618394262

T3 - Advanced Metallization Conference (AMC)

SP - 60

EP - 61

BT - Advanced Metallization Conference 2011

T2 - Advanced Metallization Conference 2011

Y2 - 4 October 2011 through 6 October 2011

ER -

Electron spin resonance studies of interlayer dielectrics

Publication series

Other

All Science Journal Classification (ASJC) codes

Other files and links

Cite this