Electron spin resonance study of E′ trapping centers in SIMOX buried oxides

John F. Conley; P. M. Lenahan

doi:10.1109/23.124100

Electron spin resonance study of E′ trapping centers in SIMOX buried oxides

John F. Conley, P. M. Lenahan

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Abstract

We combine electron spin resonance and capacitance versus voltage measurements with vacuum ultraviolet and ultraviolet illumination sequences to study E′ centers in a variety of SIMOX buried oxides. The oxides had all been annealed above 1300°C. Our results clearly show that E′ centers play an important, probably dominating role in the trapping behavior of these oxides. This role is considerably different from the role that E′ centers play in thermal oxides.

Original language	English (US)
Pages (from-to)	1247-1252
Number of pages	6
Journal	IEEE Transactions on Nuclear Science
Volume	38
Issue number	6
DOIs	https://doi.org/10.1109/23.124100
State	Published - Dec 1991

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Nuclear Energy and Engineering
Electrical and Electronic Engineering

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10.1109/23.124100

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title = "Electron spin resonance study of E′ trapping centers in SIMOX buried oxides",

abstract = "We combine electron spin resonance and capacitance versus voltage measurements with vacuum ultraviolet and ultraviolet illumination sequences to study E′ centers in a variety of SIMOX buried oxides. The oxides had all been annealed above 1300°C. Our results clearly show that E′ centers play an important, probably dominating role in the trapping behavior of these oxides. This role is considerably different from the role that E′ centers play in thermal oxides.",

author = "Conley, {John F.} and Lenahan, {P. M.}",

year = "1991",

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doi = "10.1109/23.124100",

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T1 - Electron spin resonance study of E′ trapping centers in SIMOX buried oxides

AU - Conley, John F.

AU - Lenahan, P. M.

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Y1 - 1991/12

N2 - We combine electron spin resonance and capacitance versus voltage measurements with vacuum ultraviolet and ultraviolet illumination sequences to study E′ centers in a variety of SIMOX buried oxides. The oxides had all been annealed above 1300°C. Our results clearly show that E′ centers play an important, probably dominating role in the trapping behavior of these oxides. This role is considerably different from the role that E′ centers play in thermal oxides.

AB - We combine electron spin resonance and capacitance versus voltage measurements with vacuum ultraviolet and ultraviolet illumination sequences to study E′ centers in a variety of SIMOX buried oxides. The oxides had all been annealed above 1300°C. Our results clearly show that E′ centers play an important, probably dominating role in the trapping behavior of these oxides. This role is considerably different from the role that E′ centers play in thermal oxides.

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DO - 10.1109/23.124100

M3 - Article

AN - SCOPUS:0026400390

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JO - IEEE Transactions on Nuclear Science

JF - IEEE Transactions on Nuclear Science

IS - 6

ER -

Electron spin resonance study of E′ trapping centers in SIMOX buried oxides

Abstract

All Science Journal Classification (ASJC) codes

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