Electron traps, structural change, and hydrogen related SIMOX defects

J. F. Conley, P. M. Lenahan, P. Roitman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publication1992 IEEE International SOI Conference, SOI 1992 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages26-27
Number of pages2
ISBN (Electronic)0780307763
DOIs
StatePublished - 1992
Event1992 IEEE International SOI Conference, SOI 1992 - Ponte Vedra Beach, United States
Duration: Oct 6 1992Oct 8 1992

Publication series

NameProceedings - IEEE International SOI Conference
ISSN (Print)1078-621X

Conference

Conference1992 IEEE International SOI Conference, SOI 1992
Country/TerritoryUnited States
CityPonte Vedra Beach
Period10/6/9210/8/92

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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