Abstract
Electrophoretic deposition (EPD) is a potential alternative technology for handling the very fine powders and producing the very thin layers that will be necessary to be competitive in the capacitor market in the 21st century. This article addresses several methods of integrating EPD into a standard industrial tape casting and lamination process, using the specific example of the fabrication of a Barium Titanate Multilayer capacitor with sub-micron electrode layers.
Original language | English (US) |
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Pages (from-to) | 647-652 |
Number of pages | 6 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3906 |
State | Published - 1999 |
Event | Proceedings of the 1999 International Symposium on Microelectronics - Chicago, IL, USA Duration: Oct 26 1999 → Oct 28 1999 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering