Electrothermally Tunable Arch Resonator

Engineering

• Resonator 100%
• Arch 100%
• Resonance Frequency 80%
• Thermal Stress 20%
• Good Agreement 20%
• Finite Element Modeling 20%
• Compressive Stress 20%
• Analytical Result 20%
• Axial Stress 20%
• Initial Value 20%
• Bernoulli Beam 20%
• Load Voltage 20%

Material Science

• Resonator 100%
• Silicon 50%
• Thermal Expansion 50%
• Finite Element Modeling 50%
• Thermal Stress 50%
• Euler-Bernoulli Beam Theory 50%

Keyphrases

• Arch Beam 66%
• Nonlinear Euler-Bernoulli Beam 33%
• Voltage-dependent Loads 33%
• Shallow Arch 33%