Energetic and thermal Sn interactions and their effect on EUVL source collector mirror lifetime at high temperatures

J. P. Allain, M. Nieto, M. Hendricks, A. Hassanein, C. Tarrio, S. Grantham, V. Bakshi

Research output: Contribution to journalConference articlepeer-review

7 Scopus citations

Fingerprint

Dive into the research topics of 'Energetic and thermal Sn interactions and their effect on EUVL source collector mirror lifetime at high temperatures'. Together they form a unique fingerprint.

Engineering

Earth and Planetary Sciences

Physics

Material Science

Keyphrases