Engineering
Energetics
100%
Extreme-Ultraviolet Lithography
100%
Energetic Ion
50%
Light Source
25%
Spectral Range
25%
Structure Surface
25%
Incident Angle
25%
Ray Photoelectron Spectroscopy
25%
Surface Morphology
25%
Lithography
25%
Component Lifetime
25%
Commercial Feasibility
25%
Earth and Planetary Sciences
Reflectance
100%
Charged Particle
50%
State of the Art
25%
Real Time
25%
Fluence
25%
Photoelectron Spectroscopy
25%
Surface Property
25%
Energetic Particle
25%
X Ray
25%
Ion Irradiation
25%
Ion Current
25%
Thermal Evaporation
25%
Physics
Energetics
100%
Charged Particle
50%
Light Source
25%
X Ray Spectroscopy
25%
Fluence
25%
Ion Scattering
25%
Ion Current
25%
Ion Irradiation
25%
Surface Properties
25%
Thermal Evaporation
25%
Energetic Particle
25%
Material Science
Reflectivity
100%
Chemical State
50%
Surface Structure
25%
X-Ray Photoelectron Spectroscopy
25%
Surface Property
25%
Lithography
25%
Surface Morphology
25%
Low-Energy Ion Scattering Spectroscopy
25%
Keyphrases
Surface Fraction
16%
Exposure Method
16%
Sn-based
16%
Evaporative Sources
16%
Mirror Sample
16%
At-wavelength
16%
Lithography Technology
16%