TY - JOUR
T1 - Energy and angular distributions of atoms sputtered from polycrystalline surfaces
T2 - Thompson and beyond
AU - Garrison, Barbara J.
N1 - Funding Information:
This work was enhanced greatly by discussions with J. Baxter, D.E. Harrison, P. Kobrin, D.Y. Lo, A. Schick, M.H. Shapiro, J. Sir&, T.A. Tombrello and N. Winograd. The financial support of the National Science Foundation, the Office of Naval Research, the IBM Corporation, and the Camille and Henry Dryfus Foundation is gratefully acknowledged.
PY - 1989/4/2
Y1 - 1989/4/2
N2 - We present a new analytic model for the energy and angular distributions of atoms ejected due to keV particle bombardment at normal incidence from polycrystalline solids. The main modification from the Thompson model is to assume that the velocity distribution near the surface region is not isotropic. The model presented here predicts that the peak in the energy distribution shifts to lower energies as the polar angle increases and that the polar distribution becomes narrower as the energy of the particles increases. We have shown from computer simulations that the anisotropy in the surface region is due to the inherent asymmetry of the surface-vacuum interface. Finally, we and others have shown that the energy cost to remove an atom from the solid is greater than the heat of sublimation.
AB - We present a new analytic model for the energy and angular distributions of atoms ejected due to keV particle bombardment at normal incidence from polycrystalline solids. The main modification from the Thompson model is to assume that the velocity distribution near the surface region is not isotropic. The model presented here predicts that the peak in the energy distribution shifts to lower energies as the polar angle increases and that the polar distribution becomes narrower as the energy of the particles increases. We have shown from computer simulations that the anisotropy in the surface region is due to the inherent asymmetry of the surface-vacuum interface. Finally, we and others have shown that the energy cost to remove an atom from the solid is greater than the heat of sublimation.
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U2 - 10.1016/0168-583X(89)90987-7
DO - 10.1016/0168-583X(89)90987-7
M3 - Article
AN - SCOPUS:0024646682
SN - 0168-583X
VL - 40-41
SP - 313
EP - 316
JO - Nuclear Inst. and Methods in Physics Research, B
JF - Nuclear Inst. and Methods in Physics Research, B
IS - PART 1
ER -