We propose that the energy cost to remove one atom from the surface during ion bombard- ment is larger than the surface binding energy or bulk heat of sublimation. It is this value of the energy cost that is appropriate for use in analytic models of the sputtering process.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry