TY - JOUR
T1 - Energy dependent studies of anisotropic atomic sputtering of Ni(111)
AU - Wucher, A.
AU - Watgen, M.
AU - Mößner, C.
AU - Oechsner, H.
AU - Garrison, B. J.
PY - 1992/4/1
Y1 - 1992/4/1
N2 - The anisotropic ejection of atoms sputtered from a Ni(111) surface by Ar+ ions of 1.1 keV was investigated by angle- and energy-resolved secondary neutral mass spectrometry (SNMS). The angular distribution of sputtered atoms exhibits three different peaks which correspond to a preferred emission along the close packed [111]-, [110]- and [100]-directions of the crystal, respectively. The intensity as well as the location of the "spots" are shown to depend strongly on the ejection energy E of the sputtered atoms. Also, the energy distributions measured in and outside of the spot directions are found to differ significantly. The results are reproduced at least qualitatively by a molecular dynamics simulation using a many-body embedded atom interaction potential.
AB - The anisotropic ejection of atoms sputtered from a Ni(111) surface by Ar+ ions of 1.1 keV was investigated by angle- and energy-resolved secondary neutral mass spectrometry (SNMS). The angular distribution of sputtered atoms exhibits three different peaks which correspond to a preferred emission along the close packed [111]-, [110]- and [100]-directions of the crystal, respectively. The intensity as well as the location of the "spots" are shown to depend strongly on the ejection energy E of the sputtered atoms. Also, the energy distributions measured in and outside of the spot directions are found to differ significantly. The results are reproduced at least qualitatively by a molecular dynamics simulation using a many-body embedded atom interaction potential.
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U2 - 10.1016/0168-583X(92)95867-Q
DO - 10.1016/0168-583X(92)95867-Q
M3 - Article
AN - SCOPUS:0003837479
SN - 0168-583X
VL - 67
SP - 531
EP - 535
JO - Nuclear Inst. and Methods in Physics Research, B
JF - Nuclear Inst. and Methods in Physics Research, B
IS - 1-4
ER -