Energy distributions of atoms sputtered from polycrystalline surfaces

Barbara J. Garrison

Research output: Contribution to journalArticlepeer-review

41 Scopus citations


A new formula is presented for the energy and angular distributions of atoms ejected from polycrystalline solids due to keV particle bombardment. The formula predicts that the peak position in the energy distribution decreases with increasing polar angle from the surface normal. It also predicts that the angular distribution is ∼cos θ for low energy particles and is ∼cos2 θ as the energy of the particles increases.

Original languageEnglish (US)
Pages (from-to)305-308
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Issue number4
StatePublished - Nov 1 1986

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation


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