TY - JOUR
T1 - Energy distributions of atoms sputtered from polycrystalline surfaces
AU - Garrison, Barbara J.
N1 - Funding Information:
This work was enhanced greatly by discussions with N. Winograd, A. Schick, P. Kobrin, J. Baxter and J. Singh. In addition, they provided the experimental re-suts prior to publication. The financial support of the National Science Foundation, the Office of Naval Research, the IBM Corporation, and the Camille and Henry Dreyfus Foundation is gratefully acknowledged. B.J.G. also appreciatest he hospitality of W.A. Goddard during her sabbatical leave at Caltech.
PY - 1986/11/1
Y1 - 1986/11/1
N2 - A new formula is presented for the energy and angular distributions of atoms ejected from polycrystalline solids due to keV particle bombardment. The formula predicts that the peak position in the energy distribution decreases with increasing polar angle from the surface normal. It also predicts that the angular distribution is ∼cos θ for low energy particles and is ∼cos2 θ as the energy of the particles increases.
AB - A new formula is presented for the energy and angular distributions of atoms ejected from polycrystalline solids due to keV particle bombardment. The formula predicts that the peak position in the energy distribution decreases with increasing polar angle from the surface normal. It also predicts that the angular distribution is ∼cos θ for low energy particles and is ∼cos2 θ as the energy of the particles increases.
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U2 - 10.1016/0168-583X(86)90116-3
DO - 10.1016/0168-583X(86)90116-3
M3 - Article
AN - SCOPUS:0022808892
SN - 0168-583X
VL - 17
SP - 305
EP - 308
JO - Nuclear Inst. and Methods in Physics Research, B
JF - Nuclear Inst. and Methods in Physics Research, B
IS - 4
ER -