Energy distributions of atoms sputtered from polycrystalline surfaces

Barbara J. Garrison

doi:10.1016/0168-583X(86)90116-3

Energy distributions of atoms sputtered from polycrystalline surfaces

Barbara J. Garrison

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

A new formula is presented for the energy and angular distributions of atoms ejected from polycrystalline solids due to keV particle bombardment. The formula predicts that the peak position in the energy distribution decreases with increasing polar angle from the surface normal. It also predicts that the angular distribution is ∼cos θ for low energy particles and is ∼cos² θ as the energy of the particles increases.

Original language	English (US)
Pages (from-to)	305-308
Number of pages	4
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	17
Issue number	4
DOIs	https://doi.org/10.1016/0168-583X(86)90116-3
State	Published - Nov 1 1986

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Instrumentation

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10.1016/0168-583X(86)90116-3

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title = "Energy distributions of atoms sputtered from polycrystalline surfaces",

abstract = "A new formula is presented for the energy and angular distributions of atoms ejected from polycrystalline solids due to keV particle bombardment. The formula predicts that the peak position in the energy distribution decreases with increasing polar angle from the surface normal. It also predicts that the angular distribution is ∼cos θ for low energy particles and is ∼cos2 θ as the energy of the particles increases.",

author = "Garrison, \{Barbara J.\}",

note = "Funding Information: This work was enhanced greatly by discussions with N. Winograd, A. Schick, P. Kobrin, J. Baxter and J. Singh. In addition, they provided the experimental re-suts prior to publication. The financial support of the National Science Foundation, the Office of Naval Research, the IBM Corporation, and the Camille and Henry Dreyfus Foundation is gratefully acknowledged. B.J.G. also appreciatest he hospitality of W.A. Goddard during her sabbatical leave at Caltech.",

year = "1986",

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doi = "10.1016/0168-583X(86)90116-3",

language = "English (US)",

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T1 - Energy distributions of atoms sputtered from polycrystalline surfaces

AU - Garrison, Barbara J.

N1 - Funding Information: This work was enhanced greatly by discussions with N. Winograd, A. Schick, P. Kobrin, J. Baxter and J. Singh. In addition, they provided the experimental re-suts prior to publication. The financial support of the National Science Foundation, the Office of Naval Research, the IBM Corporation, and the Camille and Henry Dreyfus Foundation is gratefully acknowledged. B.J.G. also appreciatest he hospitality of W.A. Goddard during her sabbatical leave at Caltech.

PY - 1986/11/1

Y1 - 1986/11/1

N2 - A new formula is presented for the energy and angular distributions of atoms ejected from polycrystalline solids due to keV particle bombardment. The formula predicts that the peak position in the energy distribution decreases with increasing polar angle from the surface normal. It also predicts that the angular distribution is ∼cos θ for low energy particles and is ∼cos2 θ as the energy of the particles increases.

AB - A new formula is presented for the energy and angular distributions of atoms ejected from polycrystalline solids due to keV particle bombardment. The formula predicts that the peak position in the energy distribution decreases with increasing polar angle from the surface normal. It also predicts that the angular distribution is ∼cos θ for low energy particles and is ∼cos2 θ as the energy of the particles increases.

UR - https://www.scopus.com/pages/publications/0022808892

UR - https://www.scopus.com/pages/publications/0022808892#tab=citedBy

U2 - 10.1016/0168-583X(86)90116-3

DO - 10.1016/0168-583X(86)90116-3

M3 - Article

AN - SCOPUS:0022808892

SN - 0168-583X

VL - 17

SP - 305

EP - 308

JO - Nuclear Inst. and Methods in Physics Research, B

JF - Nuclear Inst. and Methods in Physics Research, B

IS - 4

ER -

Energy distributions of atoms sputtered from polycrystalline surfaces

Abstract

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