Abstract
The morphological features of thin SiOx films deposited on polystyrene and polycarbonate substrates were studied using atomic force microscopy and transmission electron microscopy. Preliminary evidence for additional morphology/permeability relationships was provided. The permeance of SiOx-coated polymers depended strongly on both the film roughness and thickness, decreasing with a reduction in roughness or an increase in thickness. To a lesser extent, the barrier performance also depended on the deposition power level, suggesting that an optimal power level may exist.
Original language | English (US) |
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Pages (from-to) | 311-315 |
Number of pages | 5 |
Journal | Journal of Materials Science Letters |
Volume | 18 |
Issue number | 4 |
DOIs | |
State | Published - 1999 |
All Science Journal Classification (ASJC) codes
- General Materials Science