Enhanced charge storage characteristics of silicon nanocrystals fabicated by electron-beam coevaporation of Si and SiO_{x(x=1 or 2)}

Keyphrases

• Electron Beam 100%
• SiOx 100%
• Charge Storage 100%
• Storage Characteristics 100%
• Silicon Nanocrystals 100%
• Source Material 66%
• Raman Spectra 33%
• Transmission Electron Microscopy Images 33%
• Sweeping 33%
• Size-density 33%
• Area Density 33%
• Capacitor Structure 33%
• Spectrum Measurement 33%
• Memory Window 33%
• Weight Ratio 33%
• Non-volatile Memory 33%
• Deposited Film 33%
• Crystal Fractionation 33%
• Metal-oxide-semiconductor Capacitor (MOSCAP) 33%
• Image Spectrum 33%

Engineering

• Charge Storage 100%
• Silicon Nanocrystal 100%
• Source Material 66%
• Deposited Film 33%
• Area Density 33%
• Metal Oxide Semiconductor 33%
• Nonvolatile Memory 33%

Material Science

• Silicon 100%
• Film 33%
• Density 33%
• Transmission Electron Microscopy 33%
• Capacitor 33%
• Oxide Semiconductor 33%
• Metal Oxide 33%
• Volume Fraction 33%