Enhanced nucleation, smoothness and conformality of ultrananocrystalline diamond (UNCD) ultrathin films via tungsten interlayers
- Nevin N. Naguib
- , Jeffrey W. Elam
- , James Birrell
- , Jian Wang
- , David S. Grierson
- , Bernd Kabius
- , Jon M. Hiller
- , Anirudha V. Sumant
- , Robert W. Carpick
- , Orlando Auciello
- , John A. Carlisle
Research output: Contribution to journal › Article › peer-review
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