ENHANCEMENT OF Q AND K2IN AL0.8SC0.2N/GAN/SAPPHIRE SURFACE ACOUSTIC WAVE RESONATORS USING SEMICONDUCTOR GROUND CONTACT

Yue Zheng; Jialin Wang; Mingyo Park; Ping Wang; Ding Wang; Zetian Mi; Azadeh Ansari

ENHANCEMENT OF Q AND K²IN AL_0.8SC_0.2N/GAN/SAPPHIRE SURFACE ACOUSTIC WAVE RESONATORS USING SEMICONDUCTOR GROUND CONTACT

Yue Zheng
, Jialin Wang
, Mingyo Park
, Ping Wang
, Ding Wang
, Zetian Mi
, Azadeh Ansari

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work reports on the super high frequency (SHF) surface acoustic wave (SAW) resonators with bottom ground contact, based on 200 nm-thick epitaxial aluminum scandium nitride (Al0.8Sc0.2N) on gallium nitride (GaN)/sapphire with high doped n-GaN as the bottom electrode. Al0.8Sc0.2N epitaxial films are grown on GaN/sapphire template with molecular beam epitaxy (MBE). Interdigital transducers with a pitch size of 0.4 μm are patterned with electron beam lithography (EBL). By taking advantage of a grounded bottom semiconductor contact and the high acoustic velocity of Sezawa modes, a four-time improvement of Q value from 172 to 819 is attained at a resonance frequency of 5.792 GHz.

Original language	English (US)
Title of host publication	2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022
Editors	Reza Ghodssi, Jenna F. Chan
Publisher	Transducer Research Foundation
Pages	356-359
Number of pages	4
ISBN (Electronic)	9781940470047
State	Published - 2022
Event	2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022 - Hilton Head, United States Duration: Jun 5 2022 → Jun 9 2022

Publication series

Name	2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022

Conference

Conference	2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022
Country/Territory	United States
City	Hilton Head
Period	6/5/22 → 6/9/22

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Cite this

Zheng, Y., Wang, J., Park, M., Wang, P., Wang, D., Mi, Z., & Ansari, A. (2022). ENHANCEMENT OF Q AND K²IN AL_0.8SC_0.2N/GAN/SAPPHIRE SURFACE ACOUSTIC WAVE RESONATORS USING SEMICONDUCTOR GROUND CONTACT. In R. Ghodssi, & J. F. Chan (Eds.), 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022 (pp. 356-359). (2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022). Transducer Research Foundation.

Zheng, Yue ; Wang, Jialin ; Park, Mingyo et al. / ENHANCEMENT OF Q AND K²IN AL_0.8SC_0.2N/GAN/SAPPHIRE SURFACE ACOUSTIC WAVE RESONATORS USING SEMICONDUCTOR GROUND CONTACT. 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022. editor / Reza Ghodssi ; Jenna F. Chan. Transducer Research Foundation, 2022. pp. 356-359 (2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022).

@inproceedings{3f1b3ca0d9ed494a82b7b6ff060ca02f,

title = "ENHANCEMENT OF Q AND K2IN AL0.8SC0.2N/GAN/SAPPHIRE SURFACE ACOUSTIC WAVE RESONATORS USING SEMICONDUCTOR GROUND CONTACT",

abstract = "This work reports on the super high frequency (SHF) surface acoustic wave (SAW) resonators with bottom ground contact, based on 200 nm-thick epitaxial aluminum scandium nitride (Al0.8Sc0.2N) on gallium nitride (GaN)/sapphire with high doped n-GaN as the bottom electrode. Al0.8Sc0.2N epitaxial films are grown on GaN/sapphire template with molecular beam epitaxy (MBE). Interdigital transducers with a pitch size of 0.4 μm are patterned with electron beam lithography (EBL). By taking advantage of a grounded bottom semiconductor contact and the high acoustic velocity of Sezawa modes, a four-time improvement of Q value from 172 to 819 is attained at a resonance frequency of 5.792 GHz.",

author = "Yue Zheng and Jialin Wang and Mingyo Park and Ping Wang and Ding Wang and Zetian Mi and Azadeh Ansari",

note = "Publisher Copyright: {\textcopyright} 2022 TRF.; 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022 ; Conference date: 05-06-2022 Through 09-06-2022",

year = "2022",

language = "English (US)",

series = "2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022",

publisher = "Transducer Research Foundation",

pages = "356--359",

editor = "Reza Ghodssi and Chan, \{Jenna F.\}",

booktitle = "2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022",

}

Zheng, Y, Wang, J, Park, M, Wang, P, Wang, D, Mi, Z & Ansari, A 2022, ENHANCEMENT OF Q AND K²IN AL_0.8SC_0.2N/GAN/SAPPHIRE SURFACE ACOUSTIC WAVE RESONATORS USING SEMICONDUCTOR GROUND CONTACT. in R Ghodssi & JF Chan (eds), 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022. 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022, Transducer Research Foundation, pp. 356-359, 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022, Hilton Head, United States, 6/5/22.

ENHANCEMENT OF Q AND K²IN AL_0.8SC_0.2N/GAN/SAPPHIRE SURFACE ACOUSTIC WAVE RESONATORS USING SEMICONDUCTOR GROUND CONTACT. / Zheng, Yue; Wang, Jialin; Park, Mingyo et al.
2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022. ed. / Reza Ghodssi; Jenna F. Chan. Transducer Research Foundation, 2022. p. 356-359 (2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - ENHANCEMENT OF Q AND K2IN AL0.8SC0.2N/GAN/SAPPHIRE SURFACE ACOUSTIC WAVE RESONATORS USING SEMICONDUCTOR GROUND CONTACT

AU - Zheng, Yue

AU - Wang, Jialin

AU - Park, Mingyo

AU - Wang, Ping

AU - Wang, Ding

AU - Mi, Zetian

AU - Ansari, Azadeh

PY - 2022

Y1 - 2022

N2 - This work reports on the super high frequency (SHF) surface acoustic wave (SAW) resonators with bottom ground contact, based on 200 nm-thick epitaxial aluminum scandium nitride (Al0.8Sc0.2N) on gallium nitride (GaN)/sapphire with high doped n-GaN as the bottom electrode. Al0.8Sc0.2N epitaxial films are grown on GaN/sapphire template with molecular beam epitaxy (MBE). Interdigital transducers with a pitch size of 0.4 μm are patterned with electron beam lithography (EBL). By taking advantage of a grounded bottom semiconductor contact and the high acoustic velocity of Sezawa modes, a four-time improvement of Q value from 172 to 819 is attained at a resonance frequency of 5.792 GHz.

AB - This work reports on the super high frequency (SHF) surface acoustic wave (SAW) resonators with bottom ground contact, based on 200 nm-thick epitaxial aluminum scandium nitride (Al0.8Sc0.2N) on gallium nitride (GaN)/sapphire with high doped n-GaN as the bottom electrode. Al0.8Sc0.2N epitaxial films are grown on GaN/sapphire template with molecular beam epitaxy (MBE). Interdigital transducers with a pitch size of 0.4 μm are patterned with electron beam lithography (EBL). By taking advantage of a grounded bottom semiconductor contact and the high acoustic velocity of Sezawa modes, a four-time improvement of Q value from 172 to 819 is attained at a resonance frequency of 5.792 GHz.

UR - https://www.scopus.com/pages/publications/85172655629

UR - https://www.scopus.com/pages/publications/85172655629#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:85172655629

T3 - 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022

SP - 356

EP - 359

BT - 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022

A2 - Ghodssi, Reza

A2 - Chan, Jenna F.

PB - Transducer Research Foundation

T2 - 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022

Y2 - 5 June 2022 through 9 June 2022

ER -

Zheng Y, Wang J, Park M, Wang P, Wang D, Mi Z et al. ENHANCEMENT OF Q AND K²IN AL_0.8SC_0.2N/GAN/SAPPHIRE SURFACE ACOUSTIC WAVE RESONATORS USING SEMICONDUCTOR GROUND CONTACT. In Ghodssi R, Chan JF, editors, 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022. Transducer Research Foundation. 2022. p. 356-359. (2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022).