@inproceedings{ac9f4526dfde449f8d6cbbcad1be0a6a,
title = "Enhancing reliability of CMOS devices using electrical techniques and electron spin resonance spectroscopy",
abstract = "Excessive failures due to threshold voltage shifts impacted the reliability of a CMOS Analog Comparator circuit. These shifts were attributed to a process-induced neutral hole trap. Electrical techniques were used to verify the model and determine the root cause. This work showed the need for a low cost technique for early defect detection which could be utilized during process development or as a process monitor. The method of Electron Spin Resonance (ESR) was found to confirm the electrical results of this study. ESR is being developed as a diagnostic tool for improving product reliability.",
author = "Evans, {Howard L.} and Lowry, {Robert K.} and Schultz, {William L.} and Morthorst, {Thomas J.} and Lenahan, {Pat M.} and Conley, {John F.}",
year = "1994",
doi = "10.1109/relphy.1994.307805",
language = "English (US)",
isbn = "0780313577",
series = "Annual Proceedings - Reliability Physics (Symposium)",
publisher = "Publ by IEEE",
pages = "410--419",
booktitle = "Annual Proceedings - Reliability Physics (Symposium)",
note = "Proceedings of the 32nd Annual International Reliability Physics Proceedings ; Conference date: 12-04-1994 Through 14-04-1994",
}