Abstract
In this talk the authors will highlight a filter with all epitaxially grown layers which include epitaxial metal and ScAlN. Results for the epitaxial metal will show films of molybdenum with resistivities comparable to that of bulk metal in films with thicknesses down to 50nm. Initial test show resonance frequencies of 4.3GHz
| Original language | English (US) |
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| State | Published - 2019 |
| Event | 2019 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2019 - Minneapolis, United States Duration: Apr 29 2019 → May 2 2019 |
Conference
| Conference | 2019 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2019 |
|---|---|
| Country/Territory | United States |
| City | Minneapolis |
| Period | 4/29/19 → 5/2/19 |
All Science Journal Classification (ASJC) codes
- Hardware and Architecture
- Electrical and Electronic Engineering