@article{4ccd7a406ffa401c86bd068c73b9be3a,
title = "Erratum: Optical emission investigation of the plasma enhanced chemical vapor deposition of silicon oxide films (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (1992) 10 (3395))",
author = "A. Banerjee and {Deb Roy}, T.",
year = "1993",
month = jan,
doi = "10.1116/1.578716",
language = "English (US)",
volume = "11",
pages = "271",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "1",
}