Erratum: “Optical emission investigation of the plasma enhanced chemical vapor deposition of silicon oxide films” [J. Vac. Sci. Technol. A 10, 3395 (1992)]

A. Banerjee, T. DebRoy

Research output: Contribution to journalComment/debatepeer-review

Original languageEnglish (US)
Pages (from-to)271
Number of pages1
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number1
StatePublished - Jan 1993

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this