@article{4ccd7a406ffa401c86bd068c73b9be3a,
title = "Erratum: “Optical emission investigation of the plasma enhanced chemical vapor deposition of silicon oxide films” [J. Vac. Sci. Technol. A 10, 3395 (1992)]",
author = "A. Banerjee and T. DebRoy",
year = "1993",
month = jan,
doi = "10.1116/1.578716",
language = "English (US)",
volume = "11",
pages = "271",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "1",
}