Erratum: Optical emission investigation of the plasma enhanced chemical vapor deposition of silicon oxide films (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (1992) 10 (3395))

A. Banerjee, T. Deb Roy

Research output: Contribution to journalComment/debatepeer-review

Original languageEnglish (US)
Pages (from-to)271
Number of pages1
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume11
Issue number1
DOIs
StatePublished - Jan 1993

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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