TY - GEN
T1 - Evaluation of High Frequency Piezoelectric Micromachined Ultrasound Transducers for Photoacoustic Imaging
AU - Dangi, Ajay
AU - Agrawal, Sumit
AU - Tiwari, Sudhanshu
AU - Jadhav, Shubham
AU - Cheng, Christopher
AU - Trolier-Mckinstry, Susan
AU - Pratap, Rudra
AU - Kothapalli, Sri Rajasekhar
N1 - Funding Information:
This work is supported by the National Institute of Biomedical Imaging and Bioengineering (NIBIB), National Institute of Health (NIH), U.S. under Grant R00EB017729-04 (SRK).
Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/26
Y1 - 2018/12/26
N2 - In this work, the design, fabrication, and characterization of piezoelectric micromachined ultrasound transducer (PMUT) arrays for photoacoustic imaging applications are reported. An 80-element linear PMUT array with each element having 53 PMUT cells of 125 11m cell diameter were fabricated using 650 nm thick lead zirconate titanate (PZT) as the active piezoelectric layer. The PMUTs are designed to operate at 10 MHz resonant frequency. The PMUT elements are validated for photoacoustic imaging using an agar gel phantom with embedded pencil leads as the imaging target. Photoacoustic A-line response of the targets captured by single PMUT element shows 7 MHz center frequency with 4.8 MHz bandwidth. B-mode images reconstructed from A-lines recorded during the linear scanning of a single element clearly imaged all the targets, thus validating the potential of the fabricated PMUTs for photoacoustic imaging.
AB - In this work, the design, fabrication, and characterization of piezoelectric micromachined ultrasound transducer (PMUT) arrays for photoacoustic imaging applications are reported. An 80-element linear PMUT array with each element having 53 PMUT cells of 125 11m cell diameter were fabricated using 650 nm thick lead zirconate titanate (PZT) as the active piezoelectric layer. The PMUTs are designed to operate at 10 MHz resonant frequency. The PMUT elements are validated for photoacoustic imaging using an agar gel phantom with embedded pencil leads as the imaging target. Photoacoustic A-line response of the targets captured by single PMUT element shows 7 MHz center frequency with 4.8 MHz bandwidth. B-mode images reconstructed from A-lines recorded during the linear scanning of a single element clearly imaged all the targets, thus validating the potential of the fabricated PMUTs for photoacoustic imaging.
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U2 - 10.1109/ICSENS.2018.8589733
DO - 10.1109/ICSENS.2018.8589733
M3 - Conference contribution
C2 - 31303903
AN - SCOPUS:85060861176
T3 - Proceedings of IEEE Sensors
BT - 2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 17th IEEE SENSORS Conference, SENSORS 2018
Y2 - 28 October 2018 through 31 October 2018
ER -