Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers

T. B. Xu, Z. Y. Cheng, Qiming Zhang

Research output: Contribution to journalConference articlepeer-review


We report on the performance of micromachined unimorph actuators (polymer micro-machined actuator or PMAT) based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer. Because of the high electrostrictive strain and high elastic energy density (∼ 1 J/cm3) of the active polymer (the electrostrictive P(VDF-TrFE)), the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio (DVR). In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100 kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.

Original languageEnglish (US)
Pages (from-to)296-303
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002
EventSmart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology - San Diego, CA, United States
Duration: Mar 18 2002Mar 21 2002

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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