Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers

T. B. Xu; Z. Y. Cheng; Qiming Zhang

doi:10.1117/12.475043

Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers

T. B. Xu
, Z. Y. Cheng
, Qiming Zhang

Research output: Contribution to journal › Conference article › peer-review

Abstract

We report on the performance of micromachined unimorph actuators (polymer micro-machined actuator or PMAT) based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer. Because of the high electrostrictive strain and high elastic energy density (∼ 1 J/cm³) of the active polymer (the electrostrictive P(VDF-TrFE)), the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio (DVR). In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100 kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.

Original language	English (US)
Pages (from-to)	296-303
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4700
DOIs	https://doi.org/10.1117/12.475043
State	Published - 2002
Event	Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology - San Diego, CA, United States Duration: Mar 18 2002 → Mar 21 2002

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.475043

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title = "Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers",

abstract = "We report on the performance of micromachined unimorph actuators (polymer micro-machined actuator or PMAT) based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer. Because of the high electrostrictive strain and high elastic energy density (∼ 1 J/cm3) of the active polymer (the electrostrictive P(VDF-TrFE)), the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio (DVR). In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100 kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.",

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year = "2002",

doi = "10.1117/12.475043",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology ; Conference date: 18-03-2002 Through 21-03-2002",

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T1 - Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers

AU - Xu, T. B.

AU - Cheng, Z. Y.

AU - Zhang, Qiming

PY - 2002

Y1 - 2002

N2 - We report on the performance of micromachined unimorph actuators (polymer micro-machined actuator or PMAT) based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer. Because of the high electrostrictive strain and high elastic energy density (∼ 1 J/cm3) of the active polymer (the electrostrictive P(VDF-TrFE)), the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio (DVR). In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100 kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.

AB - We report on the performance of micromachined unimorph actuators (polymer micro-machined actuator or PMAT) based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer. Because of the high electrostrictive strain and high elastic energy density (∼ 1 J/cm3) of the active polymer (the electrostrictive P(VDF-TrFE)), the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio (DVR). In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100 kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.

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EP - 303

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology

Y2 - 18 March 2002 through 21 March 2002

ER -

Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers

Abstract

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