Evidence for a negative electron-electron correlation energy in the dominant deep trapping center in silicon nitride films

Keyphrases

• Trapping Centers 100%
• Electron Correlation 100%
• Silicon Nitride Film 100%
• Nitrides 50%
• High Electric Field 50%
• Capacitance-voltage 50%
• Silicon Dioxide 50%
• Electron Spin Resonance 50%
• Silicon Nitride 50%
• Silicon Devices 50%
• Voltage Measurement 50%
• Spin Capacitance 50%
• UV Illumination 50%
• Carrier Injection 50%

Material Science

• Film 100%
• Silicon Nitride 100%
• Silicon Dioxide 33%
• Nitride Compound 33%
• Capacitance 33%
• Electron Paramagnetic Resonance Spectroscopy 33%
• Silicon Device 33%