Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils

S. S.N. Bharadwaja, A. Rajashekhar, S. W. Ko, W. Qu, M. Motyka, N. Podraza, T. Clark, C. A. Randall, S. Trolier-Mckinstry

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6 Scopus citations


Excimer laser assisted re-oxidation for reduced, crystallized BaTiO3 thin films on Ni-foils was investigated. It was found that the BaTiO3 can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiOx interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values <2% at 100 Hz, 30 mVrms excitation signal. Electron Energy Loss Spectroscopy indicated that BaTiO3 thin films can be re-oxidized to an oxygen stoichiometry close to ∼3 (e.g., stoichiometric). High resolution cross sectional transmission electron microscopy showed no evidence of NiOx formation between the BaTiO3 and the Ni foil upon excimer laser re-oxidation. Spectroscopic ellipsometry studies on laser re-oxidized [001]C and [111]C BaTiO3 single crystals indicate that the re-oxidation of BaTiO3 single crystals is augmented by photo-excitation of the ozone, as well as laser pulse induced temperature and local stress gradients.

Original languageEnglish (US)
Article number024106
JournalJournal of Applied Physics
Issue number2
StatePublished - Jan 14 2016

All Science Journal Classification (ASJC) codes

  • General Physics and Astronomy


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