Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator

Xiaotun Qiu; Rui Tang; Jie Zhu; Jonathon Oiler; Cunjiang Yu; Ziyu Wang; Hongyu Yu

doi:10.1016/j.snb.2010.04.012

Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator

Xiaotun Qiu
, Rui Tang
, Jie Zhu
, Jonathon Oiler
, Cunjiang Yu
, Ziyu Wang
, Hongyu Yu

Engineering Science and Mechanics

Research output: Contribution to journal › Letter › peer-review

41 Scopus citations

Abstract

Relative humidity (RH) was measured with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased linearly in a two-stage manner as the RH increased in the environment. For low RH (RH < 50%), a frequency downshift of 2.2 kHz per 1% RH change was observed. For high RH (RH > 50%), a frequency downshift of 8.5 kHz per 1% RH change was obtained. It was demonstrated that the two-stage response of the FBAR can be interpreted using the power law theory for semiconductor gas sensors and the mass loading effect.

Original language	English (US)
Pages (from-to)	381-384
Number of pages	4
Journal	Sensors and Actuators, B: Chemical
Volume	147
Issue number	2
DOIs	https://doi.org/10.1016/j.snb.2010.04.012
State	Published - Jun 3 2010

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2010.04.012

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title = "Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator",

abstract = "Relative humidity (RH) was measured with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased linearly in a two-stage manner as the RH increased in the environment. For low RH (RH < 50\%), a frequency downshift of 2.2 kHz per 1\% RH change was observed. For high RH (RH > 50\%), a frequency downshift of 8.5 kHz per 1\% RH change was obtained. It was demonstrated that the two-stage response of the FBAR can be interpreted using the power law theory for semiconductor gas sensors and the mass loading effect.",

author = "Xiaotun Qiu and Rui Tang and Jie Zhu and Jonathon Oiler and Cunjiang Yu and Ziyu Wang and Hongyu Yu",

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doi = "10.1016/j.snb.2010.04.012",

language = "English (US)",

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T1 - Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator

AU - Qiu, Xiaotun

AU - Tang, Rui

AU - Zhu, Jie

AU - Oiler, Jonathon

AU - Yu, Cunjiang

AU - Wang, Ziyu

AU - Yu, Hongyu

PY - 2010/6/3

Y1 - 2010/6/3

N2 - Relative humidity (RH) was measured with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased linearly in a two-stage manner as the RH increased in the environment. For low RH (RH < 50%), a frequency downshift of 2.2 kHz per 1% RH change was observed. For high RH (RH > 50%), a frequency downshift of 8.5 kHz per 1% RH change was obtained. It was demonstrated that the two-stage response of the FBAR can be interpreted using the power law theory for semiconductor gas sensors and the mass loading effect.

AB - Relative humidity (RH) was measured with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased linearly in a two-stage manner as the RH increased in the environment. For low RH (RH < 50%), a frequency downshift of 2.2 kHz per 1% RH change was observed. For high RH (RH > 50%), a frequency downshift of 8.5 kHz per 1% RH change was obtained. It was demonstrated that the two-stage response of the FBAR can be interpreted using the power law theory for semiconductor gas sensors and the mass loading effect.

UR - https://www.scopus.com/pages/publications/77953133891

UR - https://www.scopus.com/pages/publications/77953133891#tab=citedBy

U2 - 10.1016/j.snb.2010.04.012

DO - 10.1016/j.snb.2010.04.012

M3 - Letter

AN - SCOPUS:77953133891

SN - 0925-4005

VL - 147

SP - 381

EP - 384

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 2

ER -

Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator

Abstract

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