Abstract
This letter reports an experimental demonstration of charge-balanced GaN super-heterojunction Schottky barrier diodes (SHJ-SBDs). Charge balance between the n-type delta-doping and the p-type doping was achieved by adjusting the thickness of the pGaN. This device structure enabled scaling of breakdown voltage to over 3 kV, and dynamic switching up to 2.8 kV without using any field-plate.
| Original language | English (US) |
|---|---|
| Article number | 9217445 |
| Pages (from-to) | 1758-1761 |
| Number of pages | 4 |
| Journal | IEEE Electron Device Letters |
| Volume | 41 |
| Issue number | 12 |
| DOIs | |
| State | Published - Dec 2020 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering