Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators

Abdallah Ramini; Amal Hajjaj; Mohammad I. Younis

doi:10.1115/DETC201659538

Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators

Abdallah Ramini, Amal Hajjaj, Mohammad I. Younis

School of Science, Engineering & Technology (Harrisburg)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.

Original language	English (US)
Title of host publication	12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Electronic)	9780791850183
DOIs	https://doi.org/10.1115/DETC201659538
State	Published - 2016
Event	ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016 - Charlotte, United States Duration: Aug 21 2016 → Aug 24 2016

Publication series

Name	Proceedings of the ASME Design Engineering Technical Conference
Volume	6

Other

Other	ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016
Country/Territory	United States
City	Charlotte
Period	8/21/16 → 8/24/16

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Computer Graphics and Computer-Aided Design
Computer Science Applications
Modeling and Simulation

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10.1115/DETC201659538

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Ramini, A., Hajjaj, A., & Younis, M. I. (2016). Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators. In 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control (Proceedings of the ASME Design Engineering Technical Conference; Vol. 6). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC201659538

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title = "Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators",

abstract = "We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.",

author = "Abdallah Ramini and Amal Hajjaj and Younis, {Mohammad I.}",

note = "Publisher Copyright: Copyright � 2016 by ASME. Copyright: Copyright 2018 Elsevier B.V., All rights reserved.; ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016 ; Conference date: 21-08-2016 Through 24-08-2016",

year = "2016",

doi = "10.1115/DETC201659538",

language = "English (US)",

series = "Proceedings of the ASME Design Engineering Technical Conference",

publisher = "American Society of Mechanical Engineers (ASME)",

booktitle = "12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control",

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Ramini, A, Hajjaj, A & Younis, MI 2016, Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators. in 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Proceedings of the ASME Design Engineering Technical Conference, vol. 6, American Society of Mechanical Engineers (ASME), ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016, Charlotte, United States, 8/21/16. https://doi.org/10.1115/DETC201659538

Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators. / Ramini, Abdallah; Hajjaj, Amal; Younis, Mohammad I.
12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. American Society of Mechanical Engineers (ASME), 2016. (Proceedings of the ASME Design Engineering Technical Conference; Vol. 6).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators

AU - Ramini, Abdallah

AU - Hajjaj, Amal

AU - Younis, Mohammad I.

PY - 2016

Y1 - 2016

N2 - We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.

AB - We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.

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M3 - Conference contribution

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T3 - Proceedings of the ASME Design Engineering Technical Conference

BT - 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control

PB - American Society of Mechanical Engineers (ASME)

T2 - ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016

Y2 - 21 August 2016 through 24 August 2016

ER -

Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators

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