Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation

Keyphrases

• Resonant Frequency 100%
• Snap-through 100%
• Subharmonic Resonance 100%
• Resonance Regime 100%
• Snap-through Motion 100%
• Frequency Sweep 50%
• Dynamic Behavior 50%
• Sensing Applications 50%
• Actuation 50%
• Communications Applications 50%
• Softening Behavior 50%
• Frequency Behavior 50%
• Electrostatic Force 50%
• Primary Resonance 50%
• Hardening Behavior 50%
• Micro-macro 50%
• Large Oscillations 50%
• AC Load 50%
• Nonlinear Dynamic Behavior 50%
• First Resonance Frequency 50%
• Cross-well 50%
• DC Load 50%
• Clamped-clamped 50%

Engineering

• Microelectromechanical System 100%
• Experimental Investigation 100%
• Snap-Through 100%
• Arch 100%
• Resonance Frequency 75%
• Dynamic Behavior 50%
• Microscale 25%
• Experimental Result 25%
• Actuation 25%
• Hardening Behavior 25%
• Non-Linear Dynamic 25%
• Frequency Behavior 25%
• Primary Resonance 25%
• Softening Behavior 25%
• Sweep Frequency 25%

Material Science

• Snap-Through 100%