Experimental investigation on the effect of top electrode diameter in PZT thick films

Guifang Han; Jungho Ryu; Woon Ha Yoon; Jong Jin Choi; Byung Dong Hahn; Jong Woo Kim; Dong Soo Park; Shashank Priya

doi:10.1016/j.matlet.2011.04.088

Experimental investigation on the effect of top electrode diameter in PZT thick films

Guifang Han, Jungho Ryu, Woon Ha Yoon, Jong Jin Choi, Byung Dong Hahn, Jong Woo Kim, Dong Soo Park, Shashank Priya

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

We report the effect of top electrode diameter size in aerosol deposited Pb(Zr_0.52Ti_0.48)O₃ thick films (~ 10 μm-thick) with Pt top and bottom electrode. Dielectric and ferroelectric results showed that top electrode diameter of 0.5-1 mm provides reasonable performance with 1 mm being the most suitable dimension in wide range of AC electric field and frequency. The results were discussed based on the surface microstructure and Debye relaxation. The dielectric analysis showed that the properties variation was mainly due to average grain size and defect density. Debye relaxation modeling exhibited that the result is because of materials characteristic not measurement artifact. We believe the results of this study will find immediate application in design of aerosol deposition process.

Original language	English (US)
Pages (from-to)	2193-2196
Number of pages	4
Journal	Materials Letters
Volume	65
Issue number	14
DOIs	https://doi.org/10.1016/j.matlet.2011.04.088
State	Published - Jul 31 2011

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/j.matlet.2011.04.088

Cite this

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title = "Experimental investigation on the effect of top electrode diameter in PZT thick films",

abstract = "We report the effect of top electrode diameter size in aerosol deposited Pb(Zr0.52Ti0.48)O3 thick films (~ 10 μm-thick) with Pt top and bottom electrode. Dielectric and ferroelectric results showed that top electrode diameter of 0.5-1 mm provides reasonable performance with 1 mm being the most suitable dimension in wide range of AC electric field and frequency. The results were discussed based on the surface microstructure and Debye relaxation. The dielectric analysis showed that the properties variation was mainly due to average grain size and defect density. Debye relaxation modeling exhibited that the result is because of materials characteristic not measurement artifact. We believe the results of this study will find immediate application in design of aerosol deposition process.",

author = "Guifang Han and Jungho Ryu and Yoon, {Woon Ha} and Choi, {Jong Jin} and Hahn, {Byung Dong} and Kim, {Jong Woo} and Park, {Dong Soo} and Shashank Priya",

note = "Funding Information: This research was supported by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy, Republic of Korea .",

year = "2011",

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doi = "10.1016/j.matlet.2011.04.088",

language = "English (US)",

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pages = "2193--2196",

journal = "Materials Letters",

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TY - JOUR

T1 - Experimental investigation on the effect of top electrode diameter in PZT thick films

AU - Han, Guifang

AU - Ryu, Jungho

AU - Yoon, Woon Ha

AU - Choi, Jong Jin

AU - Hahn, Byung Dong

AU - Kim, Jong Woo

AU - Park, Dong Soo

AU - Priya, Shashank

N1 - Funding Information: This research was supported by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy, Republic of Korea .

PY - 2011/7/31

Y1 - 2011/7/31

N2 - We report the effect of top electrode diameter size in aerosol deposited Pb(Zr0.52Ti0.48)O3 thick films (~ 10 μm-thick) with Pt top and bottom electrode. Dielectric and ferroelectric results showed that top electrode diameter of 0.5-1 mm provides reasonable performance with 1 mm being the most suitable dimension in wide range of AC electric field and frequency. The results were discussed based on the surface microstructure and Debye relaxation. The dielectric analysis showed that the properties variation was mainly due to average grain size and defect density. Debye relaxation modeling exhibited that the result is because of materials characteristic not measurement artifact. We believe the results of this study will find immediate application in design of aerosol deposition process.

AB - We report the effect of top electrode diameter size in aerosol deposited Pb(Zr0.52Ti0.48)O3 thick films (~ 10 μm-thick) with Pt top and bottom electrode. Dielectric and ferroelectric results showed that top electrode diameter of 0.5-1 mm provides reasonable performance with 1 mm being the most suitable dimension in wide range of AC electric field and frequency. The results were discussed based on the surface microstructure and Debye relaxation. The dielectric analysis showed that the properties variation was mainly due to average grain size and defect density. Debye relaxation modeling exhibited that the result is because of materials characteristic not measurement artifact. We believe the results of this study will find immediate application in design of aerosol deposition process.

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DO - 10.1016/j.matlet.2011.04.088

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VL - 65

SP - 2193

EP - 2196

JO - Materials Letters

JF - Materials Letters

IS - 14

ER -

Experimental investigation on the effect of top electrode diameter in PZT thick films

Abstract

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