Abstract
This paper presents four organic-compatible thin film processing techniques for embedding capacitors into organic PWBs. Hydrothermal synthesis allows integration of pure nano-grained barium titanate films with capacitance density of about 1 μF/cm 2. Sol-gel and RF-sputtering in conjunction with a foil transfer process can be used to integrate a variety of perovskite thin films with the capacitance in the range of 200-400 nF/cm 2. Thermal oxidation of titanium foil also emerges as a viable process for integrating capacitance of 100s of nF using a foil transfer process. The dielectric properties of the films synthesized by these techniques as a function of various process parameters are presented. Observed dielectric properties like dielectric constant, leakage current and breakdown strengths have been correlated to structural defects and stoichiometry of the films.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1215-1221 |
| Number of pages | 7 |
| Journal | Proceedings - Electronic Components and Technology Conference |
| Volume | 2 |
| State | Published - 2005 |
| Event | 55th Electronic Components and Technology Conference, ECTC - Lake Buena Vista, FL, United States Duration: May 31 2005 → Jun 4 2005 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering