TY - GEN
T1 - Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films
AU - Saya, Daisuke
AU - Dezest, Denis
AU - Leichle, Thierry
AU - Mathieu, Fabrice
AU - Nicu, Liviu
AU - Thomas, Olivier
AU - Welsh, Aaron J.
AU - Trolier-Mckinstry, Susan
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/8/1
Y1 - 2017/8/1
N2 - We report on the fabrication and characterization of lead zirconate titanate (PZT)-coated cantilever resonators for the realization of piezoelectric nanoelectromechanical systems (NEMS) with integrated actuation and detection capabilities. PZT is deposited by microcontact printing, resulting in a relatively thin PZT film without deterioration of its piezoelectric properties induced by etching damage. The cantilever fabrication process is based on stepper ultraviolet lithography and standard micromaching. Electrical characterization was carried out with a dedicated electrical set-up enabling the devices' resonance frequency to be detected through the piezoelectric response. These characterizations validate the simultaneous actuation and detection capability of the PZT layer. Finally, modeling of the PZT cantilever results in the estimation of the piezoelectric coupling coefficient d∗31. We have found excellent large signal d∗31 of around 200 pm/V, even for PZT cantilevers with reduced dimensions.
AB - We report on the fabrication and characterization of lead zirconate titanate (PZT)-coated cantilever resonators for the realization of piezoelectric nanoelectromechanical systems (NEMS) with integrated actuation and detection capabilities. PZT is deposited by microcontact printing, resulting in a relatively thin PZT film without deterioration of its piezoelectric properties induced by etching damage. The cantilever fabrication process is based on stepper ultraviolet lithography and standard micromaching. Electrical characterization was carried out with a dedicated electrical set-up enabling the devices' resonance frequency to be detected through the piezoelectric response. These characterizations validate the simultaneous actuation and detection capability of the PZT layer. Finally, modeling of the PZT cantilever results in the estimation of the piezoelectric coupling coefficient d∗31. We have found excellent large signal d∗31 of around 200 pm/V, even for PZT cantilevers with reduced dimensions.
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U2 - 10.1109/ISAF.2017.8000219
DO - 10.1109/ISAF.2017.8000219
M3 - Conference contribution
AN - SCOPUS:85028524133
T3 - 2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference
SP - 89
EP - 92
BT - 2017 Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017 - Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - Joint IEEE International Symposium on Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices and Piezoresponse Force Microscopy Workshop, ISAF-IWATMD-PFM 2017
Y2 - 7 May 2017 through 11 May 2017
ER -