Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films

Qifa Zhou, Jonathan M. Cannata, Richard J. Meyer, David J. Van Tol, Srinivas Tadigadapa, W. Jack Hughes, K. Kirk Shung, Susan Trolier-McKinstry

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Fingerprint

Dive into the research topics of 'Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science