@inproceedings{af1adb6aed5e4efb9909a9c60186b416,
title = "Fabrication and diffraction efficiency of a 160-nm period x-ray reflection grating produced using thermally activated selective topography equilibration",
abstract = "We have fabricated a blazed X-ray reflection grating with a period of 160 nm using thermally activated selective topography equilibration (TASTE). The grating was tested for diffraction efficiency using the soft X-ray reflectometer at Lawrence Berkeley National Laboratory's Advanced Light Source. Preliminary results show total absolute diffraction efficiency ≥ 40% at lower energies, with maximum single order diffraction efficiency ranging from 20-40%. Total diffraction efficiency was ≥ 30% across the entire measured band pass of 180 eV to 1300 eV.",
author = "McCurdy, {Ross C.} and McEntaffer, {Randall L.} and McCoy, {Jake A.} and Miles, {Drew M.}",
note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX 2019 ; Conference date: 13-08-2019 Through 15-08-2019",
year = "2019",
doi = "10.1117/12.2530052",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "O'Dell, {Stephen L.} and Giovanni Pareschi",
booktitle = "Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX",
address = "United States",
}