Fabrication and electromechanical performance of a novel high modulus ionogel micro-actuator

In this work, a novel, high modulus sulfonated polymer is utilized as an ionomer for ionic liquid containing micro-ionic actuators (ionogel) is presented. The ionic polymer is composed of one-to-one ratio 4,6-bis(4-hydroxyphenyl)-N,N-diphenyl-1,3,5-triazin-2-amine and 4,4′-biphenol with bis(4-fluorophenyl) sulfone (DPA-PS:BP). The ionogel maintains a relatively higher modulus (700 MPa for 120 wt% of ionic liquid) compared to other widely used ionomers. High modulus of ionogel enables to realize thin films through solution casting. As an initial demonstration of a micro-ionic actuator, an ionic micro cantilever (200 μm × 33 μm × 5 pm) has been micromachined by using focused ion beam (FIB) milling on the substrate. The micro cantilever performance under DC actuation is tested using optical profilometer and a maximum tip displacement is 42 μm at 1.6V was obtained.