@inproceedings{15e62e7bc5914c719e07d6443460c2df,
title = "Fabrication and modeling of a novel SAW-like transducer device based on branched carbon nanotubes",
abstract = "A novel interdigital sensor and actuator device based on branched carbon nanotubes (B-CNTs) on silicon-based membranes with a high capacitance value is reported. The presence of B-CNTs leads to a high overlap between interdigital (ID) fingers and the resulted capacitance value. The formation of a sensor/actuator system is based on ID patterns on silicon-based membranes, and the branched carbon nanostructures have been grown selectively on the electrodes. The actuation behavior of the device has been investigated in a SAW-like sensor and actuator device which has been placed on a flexible membrane.",
author = "S. Darbari and Y. Abdi and A. Ebrahimi and Narges Doostani and S. Mohajerzadeh",
year = "2011",
doi = "10.1149/1.3653931",
language = "English (US)",
isbn = "9781607682905",
series = "ECS Transactions",
number = "30",
pages = "131--135",
booktitle = "Sensors, Actuators, and Microsystems (General) - 219th ECS Meeting",
edition = "30",
note = "Sensors, Actuators, and Microsystems General Session - 219th ECS Meeting ; Conference date: 01-05-2011 Through 06-05-2011",
}