Fabrication and performance of a flextensional microactuator

Keyphrases

• Flextensional 100%
• Microactuators 100%
• Actuator 33%
• Micromachining 33%
• Bonding Process 33%
• Low Temperature 16%
• Piezoelectric Materials 16%
• MEMS Devices 16%
• Large Amplitude 16%
• Large Displacement 16%
• PZT Materials 16%
• Physical Dimension 16%
• Small Strain 16%
• High Strength 16%
• Heterogeneous Materials 16%
• Beam Structure 16%
• Device Fabrication 16%
• Static Deflection 16%
• Hysteresis Pattern 16%
• Deflection Characteristics 16%
• Solder Bonding 16%
• Bulk PZT 16%
• Fast Alignment 16%

Engineering

• Low-Temperature 50%
• Piezoelectric Material 50%
• Microelectromechanical System 50%
• Beam Structure 50%
• Static Deflection 50%
• Deflection Characteristic 50%
• Repeatability 50%
• Bonding Process 50%
• Gain Factor 50%

Material Science

• Silicon 100%
• Actuator 100%
• Heterogeneous Material 50%
• Piezoelectric Material 50%
• Microelectromechanical System 50%
• Device Fabrication 50%