@article{17d38aa5171341daa9afcc55166d84df,
title = "Fabrication of compliant mechanisms on the mesoscale",
abstract = "The fabrication of compliant mechanisms on the mesoscale requires collaboration of mechanical engineering design, with materials science and engineering fabrication approaches. In this paper, a review of current fabrication approaches to produce mesoscale devices is given, highlighting the benefits and limitations of each technique. Additionally, a hierarchy is provided, eliminating fabrication techniques that do not completely satisfy the mechanical design requirements of the compliant mechanisms. Furthermore, the lost mold-rapid infiltration forming process (LM-RIF) is described, and compared to existing fabrication approaches. Finally, prototype mesoscale compliant mechanisms are fabricated, demonstrating the versatility of the LM-RIF process to produce both metal and ceramic devices, as well as ability of a fabrication process to work in collaboration with mechanical design.",
author = "Hayes, {G. R.} and Frecker, {M. I.} and Adair, {J. H.}",
note = "Funding Information: The work in this manuscript is partially funded under NSF STTR 0637850, NSF 0900368, and NSF 0437214, the NSF I/UCRC Ceramic and Composite Materials Center. This work was also supported by the Pennsylvania State University Materials Research Institute Nanofabrication Network and the National Science Foundation Cooperative Agreement No. 0335765, National Nanotechnology Infrastructure Network, with Cornell University. Any opinions, findings, and conclusions or recommendations expressed in this publication are those of the author(s) and do not necessarily reflect the views of Cornell University nor those of the National Science Foundation. The authors also gratefully acknowledge the partial support provided by grant number R21EB006488 from the National Institute of Biomedical Imaging And Bioengineering. The content in this paper is solely the responsibility of the authors and does not necessarily represent the official views of the National Institute of Biomedical Imaging And Bioengineering or the National Institutes of Health. Funding Information: Acknowledgements. The work in this manuscript is partially funded under NSF STTR 0637850, NSF 0900368, and NSF 0437214, the NSF I/UCRC Ceramic and Composite Materials Center. This work was also supported by the Pennsylvania State University Materials Research Institute Nanofabrication Network and the National Science Foundation Cooperative Agreement No. 0335765, National Nanotechnology Infrastructure Network, with Cornell University. Any opinions, findings, and conclusions or recommendations expressed in this publication are those of the author(s) and do not necessarily reflect the views of Cornell University nor those of the National Science Foundation. The authors also gratefully acknowledge the partial support provided by grant number R21EB006488 from the National Institute of Biomedical Imaging And Bioengineering. The content in this paper is solely the responsibility of the authors and does not necessarily represent the official views of the National Institute of Biomedical Imaging And Bioengineering or the National Institutes of Health. Publisher Copyright: {\textcopyright} Author(s) 2011.",
year = "2011",
doi = "10.5194/ms-2-129-2011",
language = "English (US)",
volume = "2",
pages = "129--137",
journal = "Mechanical Sciences",
issn = "2191-9151",
publisher = "Copernicus Publications",
number = "1",
}