@inproceedings{ed7ad4850c634a0b816ddd6ba39a0748,
title = "Fabrication of custom astronomical gratings for the extreme and far ultraviolet bandpasses",
abstract = "Diffraction gratings used in ultraviolet astronomical spectrographs have been made using mechanical ruling or interference lithography. However, required performance for newly developed EUV (10-90 nm) and FUV (100-180 nm) spectrographs can benefit from groove densities, blaze angles, and low-scatter enabled with electron-beam lithography patterning and chemical etching. We report on the fabrication of custom grating prototypes developed at the Nanofabrication Laboratory at Penn State University. The gratings in development for the ESCAPE NASA Small Explorer (Univ. of Colorado/Boulder) involve writing specific patterns of curved grooves with variable line density on flat substrates. The design of the grating within the DEUCE sounding rocket payload involves writing straight grooves on a spherically curved substrate. All gratings are subsequently etched to achieve the specified blaze in the silicon. These efforts are enabling new applications in the field of astronomical UV spectroscopy.",
author = "Fabien Grise and Nicholas Kruczek and Brian Fleming and Randall McEntaffer and Miles, {Drew M.} and Chad Eichfeld and Michael Labella and Kevin France",
note = "Funding Information: The authors of this paper acknowledge support from the ESCAPE Phase A contract: 80GSFC20C0087. This work was carried out in the PSU Materials Research Institute and PSU Nanofabrication Lab and the authors would like to thank the staff for their support of this grating development. F.G would like to thank Doc Daugherty from GenISys for their help in troubleshooting and optimizing the fracturing of the pattern. Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXII 2021 ; Conference date: 01-08-2021 Through 05-08-2021",
year = "2021",
doi = "10.1117/12.2594796",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Siegmund, {Oswald H.}",
booktitle = "UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXII",
address = "United States",
}