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Fabrication of free standing, three-dimensional, fibrous, thin film substrates of parylene C
L. Wei,
A. Lakhtakia
Engineering Science and Mechanics
Materials Research Institute (MRI)
Research output
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Contribution to journal
›
Article
›
peer-review
13
Scopus citations
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Keyphrases
Three-dimensional (3D)
100%
Thin Substrate
100%
Parylene C
100%
Photoresist
60%
Wafer
20%
Spin Coating
20%
Silicon Wafer
20%
Biomedical Applications
20%
Surface Morphology
20%
Vapor Deposition
20%
Seven Steps
20%
Reactive Monomer
20%
Engineering
Thin Films
100%
Photoresist
42%
Multiscale
14%
Microscale
14%
Length Scale
14%
Vapor Deposition
14%
Flowrates
14%
Silicon Wafer
14%
Biomedical Application
14%
Surface Morphology
14%
Lithography
14%
Step Procedure
14%
Bottom Surface
14%
Reactive Monomer
14%
Material Science
Thin Films
100%
Spin Coating
14%
Lithography
14%
Silicon Wafer
14%
Surface Morphology
14%