Fabrication of hemispherical structures using semiconductor technology for use in thermonuclear fusion research

Engineering & Materials Science

• Semiconductor materials 100%
• Fusion reactions 90%
• Fabrication 83%
• Inertial confinement fusion 60%
• Materials science 46%
• Electron beams 44%
• Etching 40%
• Electrons 37%
• Integrated circuits 34%
• Physics 32%
• Membranes 31%
• Glass 29%
• Silicon 29%
• Networks (circuits) 20%
• Experiments 13%

Physics & Astronomy

• fusion 91%
• fabrication 68%
• microballoons 59%
• inertial confinement fusion 44%
• hemispheres 42%
• materials science 40%
• pellets 38%
• division 35%
• integrated circuits 35%
• manufacturing 31%
• etching 28%
• solid state 28%
• membranes 27%
• electron beams 26%
• physics 23%
• glass 21%
• silicon 20%
• electrons 15%