FABRICATION OF HEMISPHERICAL STRUCTURES USING SEMICONDUCTOR TECHNOLOGY FOR USE IN THERMONUCLEAR FUSION RESEARCH.

The application of silicon-based techniques for producing laser fusion pellets is considered. Initial investigations and laboratory experiments using solid state circuit processing techniques to create special target components have indicated the feasibility of a unique advanced manufacturing concept. Efforts to demonstrate electron beam patterning and etching of micron-high letters through the walls of glass microballoons, the fabrication of free-standing thin-walled flanged hemispheres joined to form spherical structures, and a pellet support membrane are described.