Abstract
Ordered arrays of high aspect ratio (>10:1) ferroelectric Pb(Zr 0.52Ti 0.48)O 3 (PZT) tube structures were fabricated by vacuum infiltration of macroporous silicon (Si) templates. Improved phase purity was achieved when PZT microtubes were pyrolyzed at 300°C and partially released from the Si template to prevent a chemical reaction between the Pb and the Si during subsequent high-temperature crystallization. The free-standing microtubes were crystallized by rapid thermal annealing at 750°C for 1-3 min. Perovskite phase formation was confirmed by X-ray diffraction and transmission electron microscopy methods. Coaxial structures comprised of metallic LaNiO 3, PZT, and Pd layers were also processed to enable future electrical characterization of the ferroelectric microtubes.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2695-2701 |
| Number of pages | 7 |
| Journal | Journal of the American Ceramic Society |
| Volume | 89 |
| Issue number | 9 |
| DOIs | |
| State | Published - Sep 2006 |
All Science Journal Classification (ASJC) codes
- Ceramics and Composites
- Materials Chemistry