Original language | English (US) |
---|---|
Pages (from-to) | 327-330 |
Number of pages | 4 |
Journal | Chemical Vapor Deposition |
Volume | 12 |
Issue number | 6 |
DOIs | |
State | Published - Jun 2006 |
All Science Journal Classification (ASJC) codes
- General Chemistry
- Surfaces and Interfaces
- Process Chemistry and Technology