| Original language | English (US) |
|---|---|
| Pages (from-to) | 327-330 |
| Number of pages | 4 |
| Journal | Chemical Vapor Deposition |
| Volume | 12 |
| Issue number | 6 |
| DOIs | |
| State | Published - Jun 2006 |
All Science Journal Classification (ASJC) codes
- General Chemistry
- Surfaces and Interfaces
- Process Chemistry and Technology