Fabrication of MEMS tonpilz transducers

Keyphrases

• Tonpilz 100%
• Tonpilz Transducer 100%
• LaNiO3 100%
• PZT Film 75%
• Silicon-on-insulator 75%
• Insulator Substrate 75%
• Head Mass 50%
• PZT Thick Film 50%
• High Output 25%
• High Efficiency 25%
• Microstructure 25%
• Dielectric Properties 25%
• Dielectric Permittivity 25%
• Ferroelectric Properties 25%
• Heat Treatment 25%
• Etching Process 25%
• P-type 25%
• Lead Zirconate Titanate 25%
• Piezoelectric Thin Film 25%
• Remanent Polarization 25%
• Randomly Oriented 25%
• Heavy Tails 25%
• Dry Etching 25%
• MHz Frequency 25%
• Volatilization 25%
• Bottom Electrode 25%
• Room Temperature Resistivity 25%
• Sol-gel Process 25%
• Bulk Silicon 25%
• Wet Etching 25%
• Mass-spring System 25%
• Screen-printed 25%
• Mass-spring 25%
• Active Elements 25%
• Silver Layer 25%
• Output Capability 25%
• Metal-organic Decomposition 25%
• Silicon Layer 25%

Engineering

• Transducer 100%
• Microelectromechanical System 100%
• Silicon on Insulator 75%
• Thin Films 50%
• Conductive 50%
• Dielectrics 50%
• Piezoelectric 50%
• Room Temperature 25%
• Heat Treatment 25%
• Sol-Gel Process 25%
• Titanate 25%
• Lead Zirconate 25%
• Mols 25%
• Vaporization 25%
• Bulk Silicon 25%
• Spring Mass System 25%
• Active Element 25%
• Silicon Layer 25%

Material Science

• Film 100%
• Microelectromechanical System 100%
• Silicon 66%
• Thin Films 33%
• Piezoelectricity 33%
• Thick Films 33%
• Silver 16%
• Oxide Compound 16%
• Permittivity 16%
• Dielectric Property 16%
• Ferroelectricity 16%
• Sol-Gel 16%
• Heat Treatment 16%
• Electrical Resistivity 16%
• Lead Zirconate Titanate 16%
• Dry Etching 16%
• Bulk Silicon 16%
• Wet Etching 16%