Fabrication of micromachined piezoelectric diaphragm pumps actuated by interdigitated transducer electrodes
- Eunki Hong
- , S. V. Krishnaswamy
- , T. T. Braggins
- , C. B. Freidhoff
- , S. Trolier-McKinstry
Research output: Contribution to journal › Conference article › peer-review
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